000 00281nam a2200121 a 4500
003 EIA
001 11860
942 _02
_2ddc
_cBK
245 _aNanofabrication :
_btechniques and principles
260 _cc2012
008 141112s2012 ck r 000 u spa d
082 _a620.5
_bS827
999 _c10182
_d10182