| 000 | 00319nam a2200121 a 4500 | ||
|---|---|---|---|
| 003 | EIA | ||
| 001 | 10581 | ||
| 942 |
_02 _2ddc _cBK |
||
| 245 |
_aCleanroom technology : _bfundamentals of design, testing and operation. - 2 ed. |
||
| 260 | _cc2010 | ||
| 008 | 141112s2010 ck r 000 u spa d | ||
| 082 |
_a620.86 _bW629 _c2ed |
||
| 999 |
_c1996 _d1996 |
||