| 000 | 00373nam a2200121 a 4500 | ||
|---|---|---|---|
| 003 | EIA | ||
| 001 | 11893 | ||
| 942 |
_02 _2ddc _cBK |
||
| 245 |
_aFundamentals of microfabrication and nanotechnology : _bManufacturing techniques for microfabrication and nanotechnology. V.2 - 3 ed |
||
| 260 | _c2012 | ||
| 008 | 141112s2012 ck r 000 u spa d | ||
| 082 |
_a620.5 _bM183 _cV2 3ed |
||
| 999 |
_c6126 _d6126 |
||